Accuracy | ±10um |
---|---|
Tray size | JEDEC Tray-140x320mm |
IC size | ≦15mm(D)/3mm-11.4mm(W)/0.9-5mm(H) |
Translation range | Wafers:300mm-400mm |
Rotation range | Pick-Place heads:90°/180°/270° |
Unit per Hour;UPH | 8000 |
tUBE SIZE | 530mm-330mm(D),8mm-16mm(W),3mm-10mm(H) |
Sysem requirement | Power:110V / 220V AC,50/60Hz,1Phase;Pneumatic source:5kg/cm²;Vacuum:450mm-Hg |